Releasing and Scheduling of Lots in a Wafer Fab.
Subhash C. SarinVinod D. ShenaiLixin WangPublished in: AAIM (2007)
Keyphrases
- semiconductor manufacturing
- wafer fabrication
- scheduling problem
- scheduling algorithm
- resource allocation
- dynamic scheduling
- integrated circuit
- resource constraints
- massively parallel
- privacy protection
- process control
- round robin
- job shop
- parallel machines
- flexible manufacturing systems
- parallel processors
- job shop scheduling problem
- database
- sensitive information
- search algorithm
- metadata
- information retrieval