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etch optimization and electrical characterization for 0.13 mum interconnects.
Ramana Murthy
Y. W. Chen
A. Krishnamoorthy
X. T. Chen
Published in:
Microelectron. Reliab. (2005)
Keyphrases
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optimization algorithm
artificial intelligence
global optimization
information retrieval
optimization problems
optimization process
optimization procedure
lower cost
knowledge base
input output
combinatorial optimization
manufacturing systems
constrained optimization
distribution networks