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Laser-based Thickness Control in a Double-Side Polishing System for Silicon Wafers.

Liang ZhuBiao MeiWeidong ZhuWei Li
Published in: Sensors (2020)
Keyphrases
  • control system
  • control method
  • integrated circuit
  • high speed
  • data sets
  • vision system
  • control strategy
  • robotic systems
  • process control
  • control problems
  • robot control