Development of a High-Performance Microaccelerometer With Position Independent Pure-Axial Stressed Piezoresistive Beams.
Mingzhi YuLibo ZhaoXiangguang HanChen JiaYong XiaPing YangYun ZhangJunjie SunGuangzhao QinZhuangde JiangPublished in: IEEE Trans. Ind. Electron. (2023)