Composition of Metal Layers in CMOS-MEMS Micromachining Process.
Benito Granados-RojasMario Alfredo Reyes-BarrancaLuis Martín Flores-NavaGriselda Stephany Abarca-JimenezMiguel Ángel Aleman-ArceYesenia Eleonor González-NavarroPublished in: CCE (2019)