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Development of a Framework for Analyzing Process Monitoring Data with Applications to Semiconductor Manufacturing Process.
Yeo-Hun Yoon
Young-Sang Kim
Sung-Jun Kim
Bong-Jin Yum
Published in:
COMPSTAT (2002)
Keyphrases
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case study
decision making
end users
knowledge discovery
software engineering
development process
databases
data mining
response time
knowledge engineering
reverse engineering