A Method for Cycle Time Estimation of Semiconductor Manufacturing Toolsets with Correlations.
Raha Akhavan-TabatabaeiShengwei DingJ. George ShanthikumarPublished in: WSC (2009)
Keyphrases
- high accuracy
- clustering method
- cost function
- experimental evaluation
- significant improvement
- estimation accuracy
- high precision
- computational cost
- objective function
- computational complexity
- prior knowledge
- dynamic programming
- multiresolution
- pairwise
- knn
- denoising
- input data
- support vector machine svm
- face recognition
- monte carlo simulation
- real time