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The fabrication of scalable multi-sensor arrays using standard CMOS technology [chemical sensors].

Mark J. MilgrewDavid R. S. CummingPaul A. Hammond
Published in: CICC (2003)
Keyphrases
  • cmos technology
  • low power
  • power consumption
  • high speed
  • real time
  • silicon on insulator
  • spl times