On-chip atomic force microscopy: Mechatronic system design and control.

S. O. Reza Moheimani Anthony G. Fowler Mohammad Maroufi Michael G. Ruppert

Published in: ACC (2016)

Keyphrases

real time control
knowledge based systems
controller design
neural network
programmable logic
control unit
single chip
computer aided
design methodology
design principles
evolutionary algorithm
physical design
vlsi design
information systems
real time
chip design
sigma delta