Anomaly Detection in Time Series Data and its Application to Semiconductor Manufacturing.

Rakhoon Hwang Seungtae Park Youngwook Bin Hyung Ju Hwang

Published in: IEEE Access (2023)

Keyphrases

anomaly detection
semiconductor manufacturing
discrete event simulation
intrusion detection
process control
detecting anomalies
network traffic

network intrusion detection
detecting anomalous
anomalous behavior
computer security
production system
detect anomalies
behavior analysis

unsupervised anomaly detection
one class support vector machines
network anomaly detection
malware detection
unsupervised learning
neural network

cumulative sum
network security
expert systems
reinforcement learning
negative selection algorithm
real time