Anomaly Detection in Time Series Data and its Application to Semiconductor Manufacturing.
Rakhoon HwangSeungtae ParkYoungwook BinHyung Ju HwangPublished in: IEEE Access (2023)
Keyphrases
- anomaly detection
- semiconductor manufacturing
- discrete event simulation
- intrusion detection
- process control
- detecting anomalies
- network traffic
- network intrusion detection
- detecting anomalous
- anomalous behavior
- computer security
- production system
- detect anomalies
- behavior analysis
- unsupervised anomaly detection
- one class support vector machines
- network anomaly detection
- malware detection
- unsupervised learning
- neural network
- cumulative sum
- network security
- expert systems
- reinforcement learning
- negative selection algorithm
- real time