Feedback control design for cluster tools with wafer residency time constraints.

Chulhan Kim Tae-Eog Lee

Published in: SMC (2012)

Keyphrases

feedback control
building blocks
design principles
open loop
design process
closed loop
design decisions
case study
adaptive control
optimal control
design patterns
control algorithm
design tools
clustering method
mobile robot
constrained clustering
clustering algorithm
autonomous control