A Continuous Cellular Automaton for the Atomistic Simulation of Evolving Surface in Anisotropic Etching.
Yan XingMiguel A. GosálvezKazuo SatoPublished in: ICNC (7) (2008)
Keyphrases
- cellular automaton
- cellular automata
- cellular automaton model
- pattern generation
- simulation environment
- surface reconstruction
- finite state machines
- simulation model
- d objects
- reaction diffusion
- three dimensional
- anisotropic diffusion
- integrated circuit
- database
- thin film
- point cloud
- object surface
- quasi static
- dynamical behavior
- databases