Hierarchical Attention Module-Based Hotspot Detection in Wafer Fabrication Using Convolutional Neural Network Model.
Mobeen ShahrozMudasir AliAlishba TahirHenry Fabian-GongoraCarlos Uc RiosMd Abdus SamadImran AshrafPublished in: IEEE Access (2024)
Keyphrases
- neural network model
- network architecture
- neural network
- artificial neural networks
- wafer fabrication
- detection algorithm
- input variables
- detection method
- false positives
- object detection
- neural models
- hierarchical model
- using artificial neural networks
- bp neural network
- multilayer perceptron
- rbf neural network
- clustering algorithm
- genetic algorithm
- visual attention
- back propagation
- back propagation neural network
- dynamic characteristics