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A High-Selectivity HNA Etching System for Bulk Micromachined Deep Holes with High Roundness.

Taotao GuanFang YangWei WangPeng LiuZexin FanLeijian ChengZikun ChenRunze YuQiancheng ZhaoWei WangDacheng Zhang
Published in: NEMS (2018)
Keyphrases
  • wide range
  • databases
  • high levels
  • significantly lower
  • special case
  • high precision
  • multi layer
  • high efficiency