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Design and fabrication of a MEMS scanning mirror with and without comb offset.

Yick Chuen ChanChun Cheong WongCongshun WangWei MaHo-Yin ChanShoulung ChenHon Lung CheungF. C. S. LeeChen-Jung Tsai
Published in: NEMS (2010)
Keyphrases
  • database
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  • website
  • case study
  • user interface
  • building blocks
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  • expert systems
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