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Development of a Sharp-Tipped L-Shaped Stylus for Measurement of Nanoscale Sidewall Features.

Kosuke UchiyamaHiroshi MurakamiAkio KatsukiTakao Sajima
Published in: Int. J. Autom. Technol. (2022)
Keyphrases
  • spatial information
  • low level
  • decision support
  • feature extraction
  • feature space
  • image features
  • feature set
  • data sets
  • neural network
  • computer vision
  • case study
  • feature vectors
  • d objects
  • development process