Pareto control in multi-objective dynamic scheduling of a stepper machine in semiconductor wafer fabrication.
Amit Kumar GuptaAppa Iyer SivakumarPublished in: WSC (2006)
Keyphrases
- wafer fabrication
- multi objective
- dynamic scheduling
- flexible manufacturing systems
- multi objective optimization
- evolutionary algorithm
- multiobjective optimization
- manufacturing systems
- multiple objectives
- objective function
- pareto optimal
- real time control
- genetic algorithm
- control system
- neural network
- nsga ii
- dynamic programming
- control strategy