The Enhancement Mechanisms of SiOx Hardness via Manipulation of Oxygen Content.
Hwanbeom ChoKyeongeun KimMinkyoung KimChinam AnNoeul SimYoungseok OhMinseung KimGyumyeong KimJinkyung ParkJin JeonMinjin KimEunae HeoYoungju LimMoonhyun LeeSanghee LeeMinji KimPublished in: IRPS (2024)