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A case study of defects due to process marginalities in deep sub-micron technology.

Hung-Sung LinChun-Ming ChenKuo-Hsiung ChenAfung WangC. H. Chao
Published in: Microelectron. Reliab. (2007)
Keyphrases
  • case study
  • machine learning
  • real time
  • cost effective
  • neural network
  • knowledge base
  • process model
  • personal computer
  • process management