Application of IEC61131-3 for semiconductor processing equipment.

Takashi Sato Eiji Yoshida Yasunori Kakebayashi Joji Asakura Norihisa Komoda

Published in: ETFA (2) (2001)

Keyphrases

data sets
real time
information retrieval
decision support
neural network
feature selection
decision making
image processing
information technology
distributed systems
operating system
information processing