Co-integration Process Compatible Input/Output (I/O) Device Options for GAA Nanosheet Technology.

Gautam Gaddemane Krishna K. Bhuwalka Philippe Matagne Gerhard Rzepa Maarten L. Van De Put Sybren Santermans Oskar Baumgartner Hao Wu Geert Hellings

Published in: ESSDERC (2022)

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