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Implementation of Novel Scheduling Methods for Dual-arm Cluster Tools with Multiple-time Reentrant flows based on Petri Nets.

TaiRan SongYan QiaoNaiQi WuYunFang HeSiWei Zhang
Published in: ICNSC (2023)
Keyphrases
  • petri net
  • expert systems
  • artificial intelligence
  • clustering algorithm
  • discrete event systems
  • design methodologies
  • colored petri nets