UNISON analysis to model and reduce step-and-scan overlay errors for semiconductor manufacturing.
Chen-Fu ChienChia-Yu HsuPublished in: J. Intell. Manuf. (2011)
Keyphrases
- semiconductor manufacturing
- probabilistic model
- cost function
- high level
- bayesian networks
- probability distribution
- experimental data
- mathematical model
- statistical model
- statistical analysis
- estimation process
- empirical data
- object model
- quantitative analysis
- conceptual model
- computational model
- data sets
- management system
- image analysis
- data analysis
- multi agent systems
- data mining