Reducing Wafer Delay Time by Robot Idle Time Regulation for Single-Arm Cluster Tools.
Wenqing XiongChunRong PanYan QiaoNaiqi WuMingxin ChenPinHui HsiehPublished in: IEEE Trans Autom. Sci. Eng. (2021)
Keyphrases
- mobile robot
- vision system
- clustering algorithm
- decision support
- software tools
- user friendly
- data points
- scheduling problem
- massively parallel
- human robot interaction
- tactile sensing
- experimental platform
- robot control
- position and orientation
- autonomous robots
- integrated circuit
- data clustering
- hierarchical structure
- dynamic environments
- software engineering