2-Step algorithm for automatic alignment in wafer dicing process.
Hyong Tae KimChang Seop SongHae Jeong YangPublished in: Microelectron. Reliab. (2004)
Keyphrases
- cost function
- learning algorithm
- times faster
- improved algorithm
- experimental evaluation
- detection algorithm
- preprocessing
- dynamic programming
- matching algorithm
- computational cost
- k means
- computational complexity
- optimization process
- objective function
- recognition algorithm
- tree structure
- segmentation algorithm
- theoretical analysis
- input data
- simulated annealing
- high accuracy
- significant improvement
- optimization algorithm
- classification algorithm
- worst case
- probabilistic model
- optimal solution
- image alignment
- multi step
- feedback loop
- protein structure alignment