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(the weakest t-norm) fuzzy GERT for evaluating uncertain process reliability in semiconductor manufacturing.
Kuo-Ping Lin
Ming-Jia Wu
Kuo-Chen Hung
Yiyo Kuo
Published in:
Appl. Soft Comput. (2011)
Keyphrases
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semiconductor manufacturing
t norm
fuzzy sets
process control
discrete event simulation
neural network
genetic algorithm
probability distribution
fuzzy logic
fuzzy set theory
aggregation operators
interval valued