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Micromechanical Force Sensor Using the Stress-Impedance Effect of Soft Magnetic FeCuNbSiB.

Joerg FroemelGildas DiguetMasanori Muroyama
Published in: Sensors (2021)
Keyphrases
  • sensor data
  • contact force
  • sensor networks
  • magnetic field
  • integrated circuit
  • position control
  • magneto optic
  • real time
  • data sets
  • image segmentation
  • multi sensor