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Micromechanical Force Sensor Using the Stress-Impedance Effect of Soft Magnetic FeCuNbSiB.
Joerg Froemel
Gildas Diguet
Masanori Muroyama
Published in:
Sensors (2021)
Keyphrases
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sensor data
contact force
sensor networks
magnetic field
integrated circuit
position control
magneto optic
real time
data sets
image segmentation
multi sensor