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An Automatic Insertion Scheme of Extra Via for DSA-MP Hybrid Lithography.

Yuqin WangCheng GuoXiaojing SuXin HongZixi LiuXiaohuan LingBojie MaPengyu RenYujie JiangYajuan SuYayi Wei
Published in: ACM Great Lakes Symposium on VLSI (2024)
Keyphrases
  • semi automatic
  • fully automatic
  • real time
  • information retrieval
  • computer vision
  • information systems
  • multiscale
  • search algorithm