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Scheduling and Control of Startup Process for Single-Arm Cluster Tools With Residency Time Constraints.
Yan Qiao
MengChu Zhou
Naiqi Wu
Qinghua Zhu
Published in:
IEEE Trans. Control. Syst. Technol. (2017)
Keyphrases
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resource constraints
real time
neural network
clustering algorithm
constraint satisfaction
control method
process control
robotic arm
reinforcement learning
constraint programming
hierarchical clustering
degrees of freedom
constrained clustering