Novel Optical Probing System with Submicron Spatial Resolution for Internal Diagnosis of VLSI Circuits.
K. OzakiH. SekiguchiS. WakanaY. GotoY. UmeharaJ. MatsumotoPublished in: ITC (1996)
Keyphrases
- vlsi circuits
- spatial resolution
- multispectral
- image reconstruction
- high resolution
- low power
- video camera
- frame rate
- high spatial resolution
- multispectral images
- spatial information
- model based diagnosis
- mixed signal
- temporal resolution
- super resolution
- hyperspectral
- high speed
- low resolution
- real time
- signal processing
- image sensor
- pattern recognition