Effects of tool stiffness and infeed scheme on planarisation. (Integrated model for simulation of planarisation process).
Libo ZhouJun ShimizuHiroshi EdaPublished in: Int. J. Manuf. Technol. Manag. (2005)
Keyphrases
- conceptual model
- mathematical model
- computational model
- formal model
- probabilistic model
- high level
- theoretical analysis
- management system
- theoretical framework
- data model
- experimental data
- analytical model
- process model
- objective function
- neural network
- monte carlo simulation
- representation scheme
- reasoning process
- discrete event
- colored petri nets