Autoencoder-Based Data Sampling for Machine Learning-Based Lithography Hotspot Detection.
Mohamed Tarek IsmailHossam ShararaKareem MadkourKarim SeddikPublished in: MLCAD (2022)
Keyphrases
- machine learning
- data sets
- high quality
- data processing
- data analysis
- original data
- prior knowledge
- data points
- data distribution
- data collection
- end users
- data quality
- training data
- database
- raw data
- sentiment analysis
- statistical methods
- random sampling
- sampling methods
- missing data
- data mining techniques
- object detection
- support vector machine
- image data
- data sources
- data mining
- neural network