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3D failure analysis in depth profiles of sequentially made FIB cuts.

C. N. Mc AuleyAndreas RummelF. W. KeatingStephan Kleindiek
Published in: Microelectron. Reliab. (2007)
Keyphrases
  • probability distribution
  • quantitative analysis
  • automatic analysis
  • real time
  • databases
  • case study
  • expert systems
  • learning algorithm
  • high quality
  • data structure
  • learning environment
  • image analysis
  • depth information