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Tentative bonding effect for maintaining alignment accuracy in bonding utilizing thick SU8 as an adhesive material.

Masahiro KondoHidetoshi MiyashitaSang-Seok LeeNobuo Matsuoka
Published in: NEMS (2015)
Keyphrases
  • high accuracy
  • computational efficiency
  • real world
  • error rate
  • prediction accuracy
  • real time
  • database
  • data sets
  • data mining
  • machine learning
  • database systems
  • evolutionary algorithm
  • classification accuracy