5.7 A MEMS Coriolis Mass Flow Sensor with 300 μ g/h/√Hz Resolution and ± 0.8mg/h Zero Stability.
Arthur C. de OliveiraJarno GroenesteijnRemco J. WiegerinkKofi A. A. MakinwaPublished in: ISSCC (2021)
Keyphrases
- high frame rate
- flow rate
- high resolution
- sensor networks
- sensor data
- real time
- high speed
- phase difference
- flow field
- sampling rate
- stability analysis
- flow patterns
- data acquisition
- optical flow
- frame rate
- consequence finding
- input parameters
- computer vision
- blood flow
- neural network
- fiber bragg grating
- conveyor belt
- asymptotic stability
- higher resolution
- frequency band
- information flow
- low frequency
- multi sensor
- image sequences
- learning algorithm