Hybrid OPC Technique for Fast and Accurate Lithography Simulation.

Pardeep Kumar S. Srivatsa P. Mantripragada S. Upreti K. V. Shravya

Published in: VLSI Design (2017)

Keyphrases

high fidelity
high quality
high accuracy
highly accurate
computationally efficient
database
real time
neural network
bayesian networks
video sequences
expert systems
simulation study
mathematical models
simulation models