Machine Learning-Based Periodic Setup Changes for Semiconductor Manufacturing Machines.
Je-Hun LeeHyun-Jung KimYoung KimYun Bae KimByung-Hee KimGu-Hwan ChungPublished in: WSC (2021)
Keyphrases
- semiconductor manufacturing
- machine learning
- discrete event simulation
- process control
- machine learning methods
- natural language processing
- machine learning algorithms
- pattern recognition
- learning algorithm
- production system
- artificial intelligence
- learning machines
- data analysis
- machine learning approaches
- feature selection
- knowledge acquisition
- text classification
- inductive learning
- machine intelligence
- supervised learning
- inductive logic programming
- learning tasks
- statistical methods
- expert systems
- decision trees
- machine learning and data mining
- data mining
- multistage
- computational intelligence
- text mining
- real time
- information extraction
- support vector machine
- knowledge representation
- active learning
- training set
- feature space
- computer science
- natural language