Monolithically Integrated Bidirectional Flow Sensor and Stacked Temperature/Humidity Sensor Based on CMOS-Compatible MEMS Technology.
Wei XuLinze HongXiaofang Pan IzharPublished in: IEEE Trans. Instrum. Meas. (2024)
Keyphrases
- sensor data
- cmos image sensor
- high speed
- data processing
- data acquisition
- analog to digital converter
- heat flow
- flow patterns
- low cost
- cost effective
- image sensor
- real time
- single chip
- parallel processing
- sensor technology
- cmos technology
- rapid development
- monitoring system
- sensor networks
- case study
- key technologies
- circuit design
- multi sensor
- mobile robot
- information systems