Feasibility analysis of a novel production method for monolithic integrated MEMS with nanogaps.
D. HohnloserD. ShuklinC. SchmidtM. KreitmaierM. BlasimAmelie HagelauerRobert WeigelPublished in: IEEE SENSORS (2016)
Keyphrases
- high accuracy
- high precision
- significant improvement
- experimental evaluation
- computational cost
- support vector machine svm
- pairwise
- mutual information
- classification accuracy
- dynamic programming
- theoretical analysis
- learning algorithm
- cost function
- detection method
- evaluation method
- support vector machine
- clustering method
- synthetic data
- optimization algorithm
- segmentation algorithm
- main contribution
- prior knowledge
- multiresolution
- objective function
- image segmentation
- feature selection