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Combining Electrothermal Actuation with Piezoelectric Actuation and Sensing in a Dynamic Mode AFM Microcantilever.
Hazhir Mahmoodi Nasrabadi
Nastaran Nikooienejad
M. Bulut Coskun
S. O. Reza Moheimani
Published in:
IEEE SENSORS (2022)
Keyphrases
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degrees of freedom
mechanical design
dynamic environments
mathematical model
similarity measure
high voltage
real time
learning algorithm
artificial intelligence
image segmentation
vision system
control algorithm
dynamically changing