Bi-objective schedule control of batch processes in semiconductor manufacturing.
Viswanath Kumar GanesanAmit Kumar GuptaAppa Iyer SivakumarPublished in: RAM (2004)
Keyphrases
- semiconductor manufacturing
- bi objective
- process control
- multi objective
- efficient solutions
- discrete event simulation
- set covering problem
- multiple objectives
- scheduling problem
- control system
- multi objective optimization
- production system
- special case
- network design
- shortest path problem
- knapsack problem
- ant colony optimization