A New Macro-Model of Gas Flow and Parameter Extraction for a CMOS-MEMS Vacuum Sensor.
Shu-Jung ChenYung-Chuan WuPublished in: Symmetry (2020)
Keyphrases
- parameter values
- mathematical model
- computational model
- neural network
- probability distribution
- data sets
- management system
- prediction model
- similarity measure
- theoretical framework
- statistical model
- high level
- autoregressive
- formal model
- neural network model
- power consumption
- experimental data
- hidden markov models
- parameter estimation
- maximum likelihood
- objective function
- probabilistic model