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Modeling of X-Y macro-positioning stage based on non-smooth neural networks.

Ruili DongYonghong TanHongdong Wu
Published in: ICCA (2010)
Keyphrases
  • neural network
  • artificial neural networks
  • genetic algorithm
  • website
  • pattern recognition
  • fuzzy logic
  • self organizing maps
  • neural nets
  • decision making
  • back propagation
  • modeling method
  • hybrid models
  • multiple stages