A high-performance triple patterning layout decomposer with balanced density.

Bei Yu Yen-Hung Lin Gerard Luk-Pat Duo Ding Kevin Lucas David Z. Pan

Published in: ICCAD (2013)

Keyphrases

low density
databases
neural network
decision making
feature selection
database systems
multiscale
search algorithm
object recognition
density function
high efficiency
high reliability
small sized
density distribution
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