The simulation of cluster tools: a new semiconductor manufacturing technology.
Todd LeBaronMark PoolPublished in: WSC (1994)
Keyphrases
- semiconductor manufacturing
- discrete event simulation
- simulation tools
- process control
- computer aided software engineering
- cost effective
- technical issues
- clustering algorithm
- data clustering
- hierarchical clustering
- computational tools
- communication technologies
- innovative ways
- semantic technologies
- simulation environment
- web technologies
- software tools
- mathematical models
- case study
- simulation models
- key technologies
- simulation model
- production system
- real life examples
- computer systems