Scheduling Cluster Tools for Concurrent Processing of Two Wafer Types.
Jun-Ho LeeHyun-Jung KimTae-Eog LeePublished in: IEEE Trans Autom. Sci. Eng. (2014)
Keyphrases
- scheduling problem
- wafer fabrication
- software tools
- real time
- clustering algorithm
- information processing
- integrated circuit
- data processing
- software engineering
- building blocks
- end users
- user friendly
- data clustering
- information systems
- data mining
- efficient processing
- flexible manufacturing systems
- dynamic scheduling
- concurrent execution
- data sets