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Single-chip surface micromachined integrated gyroscope with 50°/h Allan deviation.

John A. GeenSteven J. ShermanJohn F. ChangStephen R. Lewis
Published in: IEEE J. Solid State Circuits (2002)
Keyphrases
  • single chip
  • low power
  • low cost
  • highly parallel
  • d objects
  • three dimensional
  • cmos image sensor
  • image sensor
  • embedded processors
  • signal processor
  • high speed
  • power consumption
  • optical flow