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A Reflective-Type Heterodyne Grating Interferometer for Three-Degree-of-Freedom Subnanometer Measurement.

Junhao ZhuGuochao WangShengtong WangXinghui Li
Published in: IEEE Trans. Instrum. Meas. (2022)
Keyphrases
  • multiple types
  • databases
  • neural network
  • information retrieval
  • genetic algorithm
  • artificial intelligence
  • feature selection
  • image processing
  • clustering algorithm
  • reinforcement learning
  • management system