An Automated and Fast OPC Algorithm for OPC-Aware Layout Design.

Ye Chen Zheng Shi Xiaolang Yan

Published in: ISQED (2007)

Keyphrases

detection algorithm
learning algorithm
layout design
optimal solution
preprocessing
search space
cost function
simulated annealing
np hard
matching algorithm
optimization algorithm
worst case
computational complexity
objective function
computational cost
dynamic programming
k means
video sequences