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Platinum growth analysis in atomic layer deposition using in-situ resistance measurement.

Wen-Hao ChoChi-Chung KeiBo-Heng LiuYo-Shane YuFong-Zhi Chen
Published in: I2MTC (2016)
Keyphrases
  • image analysis
  • information retrieval
  • knowledge base
  • decision trees
  • statistical analysis
  • multi layer
  • automatic analysis